Photo Diary The photo gallery is now online, too. The pictures will be available in a size of 96x96 pixel until all group members give their consent to publish them.

Posted on Saturday, 02-Sep-2006 01:49 AM

Report finally finished! After making the last changes and double-checking the report the umpteenth time, it was finally handed in august 31st at 17:30.

Posted on Friday, 01-Sep-2006 09:21 AM

Last phase of report writing The report is on a good way. Some things still need adjustment and the analysis is not completet yet. But if everything goes smooth, we should be finished until tuesday, august 29th. All that has to be done then, is printing and binding. This leaves us at least two days margin to hand in the report.

The gallery is also on its way. The pictures that are going to be presented have to be chosen, though.

Posted on Thursday, 24-Aug-2006 05:33 AM

Older news
> Progress in the Report
> Webpage Online

Embedded MEMS Lab

In the summer term of 2006, the group of micro- and nano-systems at the federal institute of technology, ETH Zurich, organized the Embedded MEMS Lab. During one week, the participating students were given the opportunity to practically experience the whole workflow in a typical MEMS (mirco-electromechanical systems) project. The goal was to build a packaged accelerometer from a raw SOI (silicon on insulator) wafer. The design was previously elaborated by the institute's PhD Students.

The course consisted of the following modules:

  1. Photolithography
  2. Dry etching
  3. Dicing
  4. Sacrificial layer etching and critical point drying
  5. Packaging
  6. Electrical readout
  7. Sensor characterization


We were "Group 3" in this course, and would like to present our experiences on the following few pages. We will present our work which includes

The forum on this site mainly provides a possibility for the team members to coordinate their work on the report. But you're welcome to ask your questions in the public section, too.

Etomite »

Embedded MEMS Lab

« Error »

Etomite encountered the following error while attempting to parse the requested resource:
« PHP Parse Error »
PHP error debug
  Error: Cannot modify header information - headers already sent by (output started at /home/sites/ 
  Error type/ Nr.: Warning - 2 
  File: /home/sites/ 
  Line: 403 
  Line 403 source: header('Content-Type: '.$type.'; charset='.$this->config['etomite_charset']);  
Parser timing
  MySQL: 0.0635 s s(13 Requests)
  PHP: 0.0424 s s 
  Total: 0.1058 s s